%0 Journal Article %T In situDiagnostics of Plasma Processes in Microelectronics: The Current Status and Immediate Prospects, Part IV %A Orlikovskii, A. %A Rudenko, K. %A Sukhanov, Ya. %J Russian Microelectronics %V 30 %N 6 %P 343-370 %@ 1063-7397 %D 2004-10-10 %I Kluwer Academic Publishers-Plenum Publishers %~ DeepDyve