%0 Journal Article
%T In situDiagnostics of Plasma Processes in Microelectronics: The Current Status and Immediate Prospects, Part IV
%A Orlikovskii, A.
%A Rudenko, K.
%A Sukhanov, Ya.
%J Russian Microelectronics
$V 30
%N 6
%P 343-370
%@ 1063-7397
%D 2004
%I Kluwer Academic Publishers-Plenum Publishers