%0 Journal Article
%T Absorption technology of fine cleaning of nitrogen trifluoride from tetrafluoromethane
%A Blinov, I.
%A Mukhortov, D.
%A Pashkevich, D.
%A Petrov, V.
%A Alekseev, U.
%A Kambur, M.
%A Kurapova, E.
%J Russian Journal of Applied Chemistry
%V 84
%N 12
%P 2159-2163
%@ 1070-4272
%D 2012-01-25
%I SP MAIK Nauka/Interperiodica
%~ DeepDyve