%0 Journal Article %T Fabrication of sputtered titanium vanadium nitride (TiVN) thin films for micro-supercapacitors %A Anusha Thampi, V. %A Nithiyanantham, U. %A Nanda Kumar, A. %A Martin, Phil %A Bendavid, Avi %A Subramanian, B. %J Journal of Materials Science: Materials in Electronics %V 29 %N 14 %P 12457-12465 %@ 0957-4522 %D 2018-06-06 %I Springer US %~ DeepDyve