%0 Journal Article
%T Dry Etching of Copper Using Chlorine: A Review
%A Efremov, A.
%A Svettsov, V.
%J Russian Microelectronics
%V 31
%N 3
%P 179-192
%@ 1063-7397
%D 2004-10-13
%I Kluwer Academic Publishers-Plenum Publishers
%~ DeepDyve