%0 Journal Article
%T Polymer surface deformation under semicontact-mode AFM scanning
%A Petrov, A.
%A Gallyamov, R.
%J Russian Microelectronics
%V 36
%N 3
%P 164-170
%@ 1063-7397
%D 2007-05-25
%I Nauka/Interperiodica
%~ DeepDyve