%0 Journal Article
%T The Formation of Silicon Dioxide Films by TEOS Photochemical Decomposition
%A Svetlichnyi, A.
%A Polyakov, V.
%A Varzarev, Yu.
%J Russian Microelectronics
$V 30
%N 1
%P 22-26
%@ 1063-7397
%D 2004
%I Kluwer Academic Publishers-Plenum Publishers