%0 Journal Article %T The Formation of Silicon Dioxide Films by TEOS Photochemical Decomposition %A Svetlichnyi, A. %A Polyakov, V. %A Varzarev, Yu. %J Russian Microelectronics %V 30 %N 1 %P 22-26 %@ 1063-7397 %D 2004-10-10 %I Kluwer Academic Publishers-Plenum Publishers %~ DeepDyve