%0 Journal Article
%T Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection
%A Rau, E.
%A Gostev, A.
%A Shiqiu, Zhu
%A Phang, D.
%A Chan, D.
%A Thong, D.
%A Wong, W.
%J Russian Microelectronics
%V 30
%N 4
%P 207-218
%@ 1063-7397
%D 2004-10-10
%I Kluwer Academic Publishers-Plenum Publishers
%~ DeepDyve