TY - JOUR
AU - Walecki, Wojtek J.
AB - In our paper, we discuss applications of projection fringes and structured light surface metrology for measurements of the topography of specular and diffuse surfaces in semiconductor manufacturing. We report recent progress in the projection fringes metrology applied to the packaging of crystalline solar cells, and heat sinks for power devices. In addition, we also discuss the progress of metrology of highly reflective surfaces encountered in thin film solar cell manufacturing and cell phone production. We discuss factors limiting the accuracy and speed of these methods.
TI - Applications of projection fringes and structured light surface metrology for semiconductor packaging and their challenges
JF - Proceedings of SPIE
DO - 10.1117/12.2663267
DA - 2023-06-16
UR - https://www.deepdyve.com/lp/spie/applications-of-projection-fringes-and-structured-light-surface-zypM5Zfidt
SP - 125240K
EP - 125240K-4
VL - 12524
IS - 
DP - DeepDyve
ER -