TY - JOUR
AU - Lando, Jerome B.
AB - Integrated Langmuir Devices ("ILD's") are hybrid microelectronic and microptic devices developed at the Polymer Microdevice Laboratory ("PML") at Case Western Reserve University. These devices are part organic/polymeric and part inorganic, utilizing the more desirable features of each to create multifunctional devices. Langmuir films prepared by the Lang-muir-Blodgett technique have been successfully integrated into the conventional batch processing methodologies of usual semiconductors. ILD's processing techniques and several products from this process technology are described.
TI - Integrated Langmuir Devices: Structural And Microprocessing Methods
JF - Proceedings of SPIE
DO - 10.1117/12.939646
DA - 1987-01-28
UR - https://www.deepdyve.com/lp/spie/integrated-langmuir-devices-structural-and-microprocessing-methods-zYpxsvmesM
SP - 109
EP - 112
VL - 682
IS - 
DP - DeepDyve
ER -