TY - JOUR
AU1 - Xie, Junqi
AU2 - Demarteau, Marcel
AU3 - Wagner, Robert
AU4 - May, Edward
AU5 - Zhang, Jiang
AU6 - Ruiz-Oses, Miguel
AU7 - Liang, Xue
AU8 - Ben-Zvi, Ilan
AU9 - Attenkofer, Klaus
AU1 - Schubert, Susan
AU1 - Smedley, John
AU1 - Wong, Jared
AU1 - Padmore, Howard
AB - The development of X-ray techniques opens new opportunities for real-time in-situ study of photocathode growthprocess in details. The initial ultra thin Sb films during photocathode process were investigated on multiple substratesbased on different applications. The real-time X-ray scattering and post-growth X-ray reflectivity and diffractionmeasurement were performed and analyzed. Experiment results indicate that Sb deposition performs a phase changefrom amorphous to crystalline, the critical thicknesses are different on B33 float glass, Si and Mo. Two methods wereapplied for film thickness calculation from X-ray scattering data, and they agree well with thickness monitor result. Sbfilms deposited on different substrates show similar final film roughnesses. The real time x-ray study indicates that theinitial Sb layer deposition process on different substrate has different structure during deposition, the optimizedthickness of the initial Sb layer may varies depends on the substrate. This study also paved the road for further study ofthe more complex alkali metal vapor diffusion process in photocathode growth.
TI - Real time evolution of antimony deposition for high performance alkali photocathode development
JF - Proceedings of SPIE
DO - 10.1117/12.2024424
DA - 2013-09-25
UR - https://www.deepdyve.com/lp/spie/real-time-evolution-of-antimony-deposition-for-high-performance-alkali-xp36DBbDtD
SP - 884705
EP - 884705-7
VL - 8847
IS - 
DP - DeepDyve
ER -