TY - JOUR
AU - KIMURA,, Hirokazu
AB - Abstract A new method of detecting secondary electrons has been developed and found to be advantageous for a scanning electron microscope. In this method the secondary electrons from a specimen are confined by an additional magnetic field and led to a detector installed above the focusing lens for the primary beam. Accordingly the focal length of the lens can be very short so that the primary beam may have a small diameter and high intensity on a specimen. The efficiency of collecting secondary electrons has been actually improved by this method. Further this method facilitates an analysis of energy. In addition pictures showing surface topography and potential-difference of specimens were taken with a scanning electron microscope equipped with such a device. This content is only available as a PDF. © Oxford University Press
TI - New Method of Detecting Secondary Electrons on Scanning Electron Microscope
JF - Journal of Electron Microscopy
DO - 10.1093/oxfordjournals.jmicro.a049602
DA - 1968-01-01
UR - https://www.deepdyve.com/lp/oxford-university-press/new-method-of-detecting-secondary-electrons-on-scanning-electron-x0NpAH6aXN
SP - 106
EP - 111
VL - 17
IS - 2
DP - DeepDyve
ER -