TY - JOUR
AU - Phaneuf, Michael W.
AB - Laser processing of glass components is of significant commercial interest for the optoelectronics and telecommunications industries. In this paper, we present laser processing techniques using microsecond, nanosecond, and femtosecond lasers for machining of glass. Surface structures, mainly groove geometries, are generated with a diode-pumped solid-state nanosecond pulsed UV laser operating at 266 nm, a Q-switched CO 2 laser operating at 9.25 ॖm, a CO 2 laser operating at 10.6 ॖm and the femtosecond pulsed laser operating at 800 nm. Grooves are cross-sectioned and viewed with a focused ion beam (FIB) microscope. The resultant material structures are examined with respect to the differences in time scale and the appropriateness of each laser type for particular processes.
TI - Glass processing using microsecond, nanosecond and femtosecond pulsed lasers
JF - Proceedings of SPIE
DO - 10.1117/12.540701
DA - 2003-11-20
UR - https://www.deepdyve.com/lp/spie/glass-processing-using-microsecond-nanosecond-and-femtosecond-pulsed-vycKCBV7Jk
SP - 108
EP - 112
VL - 5063
IS - 1
DP - DeepDyve
ER -