TY - JOUR
AU - Friedman, Sr., Gerald
AB - Automation of semiconductor manufacturing is a very large segment of the automation industry. The automation ranges from machinery capable of handling a single semiconductor wafer to automated material handling system that transport large numbers of these wafers at one time.
TI - Aeroloader: an overhead transport system for semiconductor automation
JO - Proceedings of SPIE
DO - 10.1117/12.371175
DA - 1999-11-24
UR - https://www.deepdyve.com/lp/spie/aeroloader-an-overhead-transport-system-for-semiconductor-automation-vmYIt1i95g
SP - 188
EP - 194
VL - 3832
IS - 1
DP - DeepDyve
ER -