TY - JOUR
AU - Hosseinkhannazer, H.
AB - This paper describes the development of multi-level lab-on-a-chip devices that use integrated optics to reduce the size and cost of portable dual-function analysis systems. Silicon/polymer and all-polymer devices were fabricated that have separate optics and fluidics layers that are bonded together. The optical layer has hollow v-groove waveguides in anisotropically etched silicon or in polymethylmethacrylate (PMMA) that is replicated from the silicon in a two-step replication procedure using polyvinyl alcohol (PVA) as an intermediate negative replica. Light from hollow v-groove waveguides in the optical layer is coupled to the fluidic layer by reflection from metallized reflective planes. The fluidic layer is constructed of polydimethylsiloxane (PDMS) in a two-step positive replication procedure from a micromachined glass master. A thin intermediate PMMA layer with reflective metal strips seals both the hollow optical waveguides and the PDMS microchannels.
TI - Multilayer biochips with integrated optics replicated in PMMA and PDMS
JF - Proceedings of SPIE
DO - 10.1117/12.778515
DA - 2007-06-21
UR - https://www.deepdyve.com/lp/spie/multilayer-biochips-with-integrated-optics-replicated-in-pmma-and-pdms-vYfyzazdMJ
SP - 67960B
EP - 67960B-7
VL - 6796
IS - 1
DP - DeepDyve
ER -