TY - JOUR
AU - Kelly, M.
AB - Progress on a semiconductor growth procedure that ensures reproducible and uniform device fabrication is reported. The procedure gives high reproducibility, wafer-to-wafer, of layer thicknesses. Further work is needed to provide cheap, rapid, non-destructive materials analysis methods for use as part of the semiconductor device manufacturing process.
TI - Tunneling statistics and the manufacturability of semiconductor tunnel devices
JF - Journal of Materials Science: Materials in Electronics
DO - 10.1023/A:1011215521469
DA - 2004-10-17
UR - https://www.deepdyve.com/lp/springer-journals/tunneling-statistics-and-the-manufacturability-of-semiconductor-tunnel-vSyN6a248m
SP - 255
EP - 257
VL - 12
IS - 6
DP - DeepDyve
ER -