TY - JOUR AU1 - Serrano, Javier AB - The Cryogenic Submicron Linear Actuator (CSA) is a medium range (±5 mm) submicron resolution linear actuator suitable to be used at cryogenic temperature (12K). The unit has been developed for fine positioning use. The unit is based on classic motor-gear concept with nut and screw; different materials and lubrications have been tested for the same design configuration to compare performances. Load capability is above 20N. This paper describes main design features, results of different lubrications tested, tested performances, and main lessons learned. TI - Cryogenic submicron linear actuator JF - Proceedings of SPIE DO - 10.1117/12.856266 DA - 2010-07-19 UR - https://www.deepdyve.com/lp/spie/cryogenic-submicron-linear-actuator-vDcSy0X1o7 SP - 773949 EP - 773949-13 VL - 7739 IS - 1 DP - DeepDyve ER -