TY - JOUR
AU - Okubo, Tatsuya
AB - A process for synthesis of ultrafine ceramic particles using a high‐temperature flame is described. Thermodynamic calculations for the Si‐C‐O‐H system were performed using a computer program for calculation of complex chemical equilibrium compositions. Possible synthesis of ultrafine SiC partcles using Si, SiO, and SiO2 powders (1.0–3.0 μm) as Si sources was investigated using an electric furnace (5 kW) at 2,018 K. Particle products were characterized mainly by X‐ray diffraction analysis, field emission scanning electron microscopy, and thermogravimetry‐differential thermal analysis. Ultrafine particles (18–29 nm) of cubic SiC (β‐SiC) could be produced through Si + CH4, SiO + CH4 and SiO2 + CH4 reaction systems, respectively. The effect of hydrogen addition on the synthesis of SiC was also investigated. Ultrafine particles of 96.0% SiC selectivity were obtained when H2 was added to the SiO + CH4 reaction system, and the CH4/SiO molar ratio in this case was 2.0.
TI - Synthesis of SIC(β) ultrafine particles from Si, SiO, or SiO 2 powder and CH 4
JF - Aiche Journal
DO - 10.1002/aic.690431308
DA - 1997-01-01
UR - https://www.deepdyve.com/lp/wiley/synthesis-of-sic-ultrafine-particles-from-si-sio-or-sio-2-powder-and-uieXeimbHy
SP - 2650
EP - 2656
VL - 43
IS - S11
DP - DeepDyve
ER -