TY - JOUR
AU - de Groot, Peter J.
AB - A powerful technique for interference fringe analysis uses tunable light sources. Originally developed to solve the problem of phase shifting in large aperture systems, the technique has evolved to the simultaneous measurement of multiple surfaces and optical thickness of optical assemblies and components. Here we review the principles and current state of the art for swept-wavelength interferometry for optical testing, including recent advances in digital holographic refocusing and environmental robustness using model-based data analysis. Applications for swept-wavelength interferometry span the full optical metrology space; we provide examples of the measurement of glass substrates for rigid data storage drives to planar waveguides for augmented and mixed reality.
TI - The state of the art in swept-wavelength laser Fizeau interferometry
JO - Proceedings of SPIE
DO - 10.1117/12.2595455
DA - 2021-08-01
UR - https://www.deepdyve.com/lp/spie/the-state-of-the-art-in-swept-wavelength-laser-fizeau-interferometry-tpVxLnt38w
SP - 118170N
EP - 118170N-14
VL - 11817
IS - 
DP - DeepDyve
ER -