TY - JOUR
AU - Lei, Hong
AB - Abrasive particles are the key elements of chemical-mechanical polishing (CMP) slurry. α-alumina abrasive, commonly used in CMP slurry, often causes scratches in the polished surface because of its agglomeration and high hardness. In this paper, a kind of novel α-alumina/ferric oxide core-shell type abrasive was prepared by coating a film of ferric oxide on the surface of α-Al2O3 particles with a chemical coprecipitation method. The α-alumina/ferric oxide composite particles were characterised by time-of-flight secondary ion mass spectroscopy (TOF-SIMS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and laser particle size analyser. The results show that Fe2O3 has been successfully coated on the surface of α-alumina particles and the dispersibility of the composite particles is better than that of pure α-Al2O3 particles.
TI - Preparation and characterisation of α-alumina/ferric oxide composite abrasive
JF - International Journal of Abrasive Technology
DO - 10.1504/IJAT.2009.029097
DA - 2009-01-01
UR - https://www.deepdyve.com/lp/inderscience-publishers/preparation-and-characterisation-of-alumina-ferric-oxide-composite-rcDwaJ6clO
SP - 393
EP - 399
VL - 2
IS - 4
DP - DeepDyve
ER -