TY - JOUR
AU1 - Li, Pei
AU2 - Pan, Longfa
AU3 - Zappe, Hans
AB - Lens actuator is one of the most important components in an optical pickup system, which decides the performance of the disc readout system. A significant advance in technical capability has recently been achieved in the fabrication of integrated micro lens actuators of optical pickup by microelectromechanical systems (MEMS) technology. A comb-drive tracking and focusing integrated lens actuator fabricated on a silicon-on-insulator (SOI) wafer has been reported. Twodimensional tuning of the objective lens is generated by the integrated comb structures. Large displacements of about ±24.6μm in tracking direction and 5.7μm in focusing direction are demonstrated. The device has a high sensitivity and an ignorable coupling between the two dimensional driving movements. The small-form-factor device provides an excellent performance and size reduction. Furthermore, high quality polymer micro-lenses with high numerical aperture (NA) are fabricated on a pre-patterned hydrophobic glass substrate by liquid dispensing. The surface profiles are adjusted by the patterned diameter and the volume of the dispensed polymer, which is controlled by the dispensing time. This extremely low cost, high NA and easily fabricated lens represents an important step for further integration of the pickup system, thus expands the application area of optical storage.
TI - Micro lens actuator and polymer objective lens for optical pickup
JF - Proceedings of SPIE
DO - 10.1117/12.2014720
DA - 2012-10-21
UR - https://www.deepdyve.com/lp/spie/micro-lens-actuator-and-polymer-objective-lens-for-optical-pickup-raEE4fAtH5
SP - 87820W
EP - 87820W-5
VL - 8782
IS - 
DP - DeepDyve
ER -