TY - JOUR
AU - Ovando-Medina, V M
AB - Abstract In this work, we present the stoichiometric behaviour of \(\hbox {Ba}^{2+}\) and \(\hbox {Sr}^{2+}\) when they are deposited to make a solid solution of barium strontium titanate. \(\hbox {Ba}_{{x}}\hbox {Sr}_{1-{x}} \hbox {TiO}_{3}\) (BST) thin films of nanometric order on a quartz substrate were obtained by means of in-situ RF-magnetron co-sputtering at 495\({^{\circ }}\)C temperature, applying a total power of 120 W divided into intervals of 15 W that was distributed between two magnetron sputtering cathodes containing targets of \(\hbox {BaTiO}_{3}\) and \(\hbox {SrTiO}_{3}\), as follows: 0–120, 15–105, 30–90, 45–75, 60–60, 75–45, 90–30, 105–15 and 120–0 W. Boltzmann’s sigmoidal modified equation (Boltzmann’s profile) is proposed to explain the behaviour and the deposition ratio Ba/Sr of the BST as a function of the RF-magnetron power. The Boltzmann’s profile proposal shows concordance with experimental data of deposits of BST on substrates of nichrome under the same experimental conditions, showing differences in the ratio Ba/Sr of the BST due to the influence of the substrate.
TI - Mathematical model of Boltzmann’s sigmoidal equation applicable to the set-up of the RF-magnetron co-sputtering in thin films deposition of $$\hbox {B ...
JF - Bulletin of Materials Science
DO - 10.1007/s12034-017-1441-x
DA - 2017-09-01
UR - https://www.deepdyve.com/lp/springer-journals/mathematical-model-of-boltzmann-s-sigmoidal-equation-applicable-to-the-rPcboXm1gU
SP - 1043
EP - 1047
VL - 40
IS - 5
DP - DeepDyve
ER -