TY - JOUR
AU - Blonskij, Ivan V.
AB - Structural schemes of photoacoustic microscope and photoacoustic spectrometer of original design are described and the results are presented on photoacoustic micro- and spectroscopy for porous silicon, high-temperature superconductors, layer semiconductors, elements of integrated circuits and other materials and devices for electronics.
TI - Photoacoustic spectro- and microscopy: new diagnostic methods for materials and devices for electronics
JF - Proceedings of SPIE
DO - 10.1117/12.191990
DA - 1994-10-31
UR - https://www.deepdyve.com/lp/spie/photoacoustic-spectro-and-microscopy-new-diagnostic-methods-for-r1QJ0yTimu
SP - 194
EP - 204
VL - 2113
IS - 1
DP - DeepDyve
ER -