TY - JOUR
AU - Wang, Yongjin
AB - A freestanding GaN grating coupler is proposed for planar photonic applications within the visible-wavelength spectrum. This freestanding device was produced by double-sided fabrication, combining GaN front patterning with Si substrate back releasing and GaN slab back thinning. Transverse-electric (TE) and transverse-magnetic (TM) light-wave conversion into and out of the membrane through grating coupling was determined by optical measurement. The maximum coupling efficiency is up to 69% for TE waves and 66% for TM waves at each particular wavelength according to the finite element method (FEM) simulation results. The experimental results were also supported by reflective simulation based on rigorous coupled-wave analysis (RCWA). This work opens the way for freestanding GaN planar photonic devices operating within the visible-wavelength range. It also provides the possibility of monolithic integration of planar photonic and light sources on III-nitride active platforms.
TI - Freestanding GaN grating couplers at visible wavelengths
JF - Journal of Optics
DO - 10.1088/2040-8978/17/4/045607
DA - 2015-04-01
UR - https://www.deepdyve.com/lp/iop-publishing/freestanding-gan-grating-couplers-at-visible-wavelengths-qZ1PmAcC5B
SP - 045607
VL - 17
IS - 4
DP - DeepDyve
ER -