TY - JOUR
AU - Maeda, Ryutaro
AB - This paper reports a novel fabrication method consisting of some procedures such as cylindrical polydimethylsiloxane (PDMS) molding, ultraviolet (UV) exposure, Ni electroplating, and dry and wet etching for fabricating a microcoil structure that is expected to be used as a component within a wireless clamp meter to measure the electric power consumption of various information technology (IT) devices for the realization of a green IT society. In comparison with the conventional ultraviolet Lithographie-Gallvanoformung-Abformung (UV-LIGA) process, this method makes it possible to fabricate cylindrical microcomponents at a low-cost, mainly because of using a cheap PDMS mold. By the pre-process of the 3D UV-microreplication method, a UV resin replica pattern was clearly transferred along the surface of the cylindrical metal body within the cavity of the PDMS mold replicated from a master pattern. Ni microcoil structure was fabricated by the post-process, utilizing the UV resin replica pattern as a base for Ni electroplating.
TI - 3D UV-microreplication using cylindrical PDMS mold
JF - Microsystem Technologies
DO - 10.1007/s00542-009-0969-0
DA - 2009-12-15
UR - https://www.deepdyve.com/lp/springer-journals/3d-uv-microreplication-using-cylindrical-pdms-mold-qYcwHIro5j
SP - 1399
EP - 1411
VL - 16
IS - 9
DP - DeepDyve
ER -