TY - JOUR
AU - Lee, Taek Dong
AB - The grain size reduction mechanism of CoCrPt‐SiO2 perpendicular magnetic recording media by oxygen reactive sputtering of RuCr intermediate layer has been investigated as a function of oxygen content in the Ar sputtering gas. The media stack was Ta/Ru/RuCr/CoCrPt‐SiO2. It was found that, by the oxygen addition, Cr and Ru oxides were formed at grain boundaries of the RuCr layer and this was the reason of the intermediate layer grain size reduction, which induced the reduction of the recording layer grain size. C‐axis alignment of RuCr (0002) plane, however, was degraded as the oxygen gas ratio increased. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
TI - Grain size reduction of CoCrPt–SiO2 media by oxidation of RuCr intermediate layer grain boundary
JF - Physica Status Solidi (C): Current Topics in Solid State Physics
DO - 10.1002/pssc.200777147
DA - 2007-12-01
UR - https://www.deepdyve.com/lp/wiley/grain-size-reduction-of-cocrpt-sio2-media-by-oxidation-of-rucr-pn52xsv90R
SP - 4516
EP - 4519
VL - 4
IS - 12
DP - DeepDyve
ER -