TY - JOUR
AU - Platonov, Yuriy Y.
AB - In order to investigate industrial applications of synchrotron radiation, Hyogo Prefecture is constructing a synchrotron radiation (SR) ring at the SPring-8 site. It will operate at an electron energy of 1.5 GeV. In September, 1998, the ring will be commissioned when the SPring-8 injector begins feeding electrons into it. We developed a beam line for EUVL under the industrial applications program. In addition, we are developing a three-spherical- mirror system for EUVL. The specifications of the exposure tool target the 0.1-micrometers generation on the SIA road map. This tool consists of illumination optics, a scanning and alignment mechanism, 3-aspherical-mirror optics, and a load- lock chamber for exchanging wafers. The exposure tool is installed in a thermal chamber located at the end of the beamline. Using this system, we plan to develop a 0.1-micrometers process and fabricate MOS devices with feature sizes of 0.1- micrometers and below.
TI - Three-aspherical-mirror system for EUV lithography
JF - Proceedings of SPIE
DO - 10.1117/12.309580
DA - 1998-06-05
UR - https://www.deepdyve.com/lp/spie/three-aspherical-mirror-system-for-euv-lithography-ooYoAXRjpb
SP - 20
EP - 31
VL - 3331
IS - 1
DP - DeepDyve
ER -