TY - JOUR
AU - Perreault, Julie A.
AB - Design, microfabrication, and integration of a micromachined spatial light modulator ((mu) SLM) device are described. A large array of electrostatically actuated, piston-motion MEMS mirror segments make up the optical surface of the (mu) SLM. Each mirror segment is capable of altering the phase of reflected light by up to one wavelength for infrared illumination ((lambda) equals 1.5 micrometers ), with 4-bit resolution. The device is directly integrated with complementary metal- oxide semiconductor (CMOS) electronics, for control of spatial optical wavefront. Integration with electronics is achieved through direct fabrication of MEMS actuators and mirror structures on planarized foundry-type CMOS electronics. Technical approaches to two significant challenges associated with manufacturing the (mu) SLM is discussed: integration of the MEMS array with the electronic driver array and production of optical-quality mirror elements using a metal-polymer surface micromachining process.
TI - Large-scale metal MEMS mirror arrays with integrated electronics
JF - Proceedings of SPIE
DO - 10.1117/12.462845
DA - 2002-04-19
UR - https://www.deepdyve.com/lp/spie/large-scale-metal-mems-mirror-arrays-with-integrated-electronics-mZGECjelMw
SP - 467
EP - 476
VL - 4755
IS - 1
DP - DeepDyve
ER -