TY - JOUR
AU - Li, Guann-pyng
AB - A novel planarization technique, compressive molding planarization (CMP) is developed for implementation of a multi-layered micro coil device. Applying CMP and other micromachining techniques, a multi-layered micro coil device has been designed and fabricated, and its use in the magnetic micro actuators for hard disk drive applications has been demonstrated, showing that it can produce milli-Newton of magnetic force suitable for driving a micro actuator. The novel CMP technique can be equally applicable in other MEMS devices fabrication to ease the process integration for the complicated structure.
TI - Novel technique for fabrication of multi-layered microcoils in microelectromechanical systems (MEMS) applications
JF - Proceedings of SPIE
DO - 10.1117/12.475030
DA - 2002-07-10
UR - https://www.deepdyve.com/lp/spie/novel-technique-for-fabrication-of-multi-layered-microcoils-in-m5330ro1Vx
SP - 187
EP - 195
VL - 4700
IS - 1
DP - DeepDyve
ER -