TY - JOUR
AU - 
TI - A Silicon Microturbopump for a Rankine-Cycle Power-Generation Microsystem—Part II: Fabrication and Characterization
JF - Journal of Microelectromechanical Systems
DO - 10.1109/jmems.2010.2093562
DA - 2011-02-01
UR - https://www.deepdyve.com/lp/crossref/a-silicon-microturbopump-for-a-rankine-cycle-power-generation-ksKg0SRwtU
SP - 326
EP - 338
VL - 20
IS - 1
DP - DeepDyve
ER -