TY - JOUR
AU - Wang, Wei-Chih
AB - Piezo devices made of lead-zirconium-titanate (PZT) are known for driving mechanical device for positioning control and vibration actuation. Here we present a new rapid prototyped PZT actuator for potential 2D scanner application. The proposed 5-m thick film PZT actuator is made by directly deposited on a thin 100 m thick stainless steel substrate by using an aerosol deposition (AD) method. The actuator features a stable linear vibration and frequency response. Fabrication results, electrical impedance and mechanical response will be presented and discussed.
TI - Development of an aerosol PZT actuator for a scanner system
JF - Proceedings of SPIE
DO - 10.1117/12.2259969
DA - 2017-04-05
UR - https://www.deepdyve.com/lp/spie/development-of-an-aerosol-pzt-actuator-for-a-scanner-system-koGhHbSVFH
SP - 101700V
EP - 101700V-8
VL - 10170
IS - 
DP - DeepDyve
ER -