TY - JOUR AU - Grechishkin, R M AB - With the increasing demand for multilayer ceramic chip components a full understanding of the co-firing of ceramics with metal electrodes becomes important. In the present work the processing of a piezoelectric monolithic actuator by stacking and cofiring Ag-Pd electroded tape cast layers was studied. The inter-diffusion and microstructure of the co-fired interface of PZT ferroelectrics and Ag-Pd metal electrode were examined by scanning electron microscopy (SEM) and energy-dispersive microanalysis. No strong structural distortions and interdiffusion were observed at the co-fired ceramic-electrode interface. TI - Engineering aspects of multilayer piezoceramic actuators JF - IOP Conference Series: Materials Science and Engineering DO - 10.1088/1757-899X/49/1/012033 DA - 2013-12-13 UR - https://www.deepdyve.com/lp/iop-publishing/engineering-aspects-of-multilayer-piezoceramic-actuators-kLeCFwEa0R SP - 012033 VL - 49 IS - 1 DP - DeepDyve ER -