TY - JOUR
AU - Kim, Yong P.
AB - The new material processing characteristic of aluminum nitride (AlN) ceramic is compared with microsecond, nanosecond and femtosecond laser ablation. The conventional laser material processing technology with longer pulsewidth laser such as TEA CO 2 laser, Q-switched YAG laser, and excimer lasers leads to the thermal shock or lateral damage on target material, and those thermal effect causes the surface modification of AlN ceramic target. The comparative study of the laser ablation with microsecond TEA CO 2 laser pulse, nanosecond KrF excimer laser pulse, and femtosecond Ti:sapphire laser pulse is performed in time domain. Using intense ultrashort titanium sapphire laser two-photon laser ablation of TiO 2 photo-catalyst was also investigated experimentally and theoretically aiming at the enhancement of photo-catalyst reaction. The black-surfacing of the TiO 2 photo- catalyst crystal was successfully achieved by drilling a large number of conical micro-holes with two-photon laser ablation. The ablated surface has a roughness of sub micrometer order, and no heat-affected zone was observed. The simple equation is developed to explain two-photon ablation process of the TiO 2 photo- catalyst and the dependence of the ablation characteristic on the pulsewidth.
TI - Functional material processing using intense femtosecond, nanosecond, and microsecond laser ablation
JF - Proceedings of SPIE
DO - 10.1117/12.407349
DA - 2000-08-16
UR - https://www.deepdyve.com/lp/spie/functional-material-processing-using-intense-femtosecond-nanosecond-jUWMtjzcA1
SP - 210
EP - 217
VL - 4065
IS - 1
DP - DeepDyve
ER -