TY - JOUR
AU - Bloomstein, Theodore M.
AB - We update previously reported results on the absorption of optical materials and coatings for use in 157 nm based optical projection system. New results include the transmissions spectrum of a modified from of fused silica with suitable initial transmission for use as a mask substrate. We also report on a more systematic study of the effects of surface contaminants on optical components at 157 nm. We have modified our vacuum spectrometer to allow in- situ cleaning to enable a closer examination of purging requirements and cleaning procedures.
TI - Optical materials and coatings at 157 nm
JF - Proceedings of SPIE
DO - 10.1117/12.351106
DA - 1999-06-25
UR - https://www.deepdyve.com/lp/spie/optical-materials-and-coatings-at-157-nm-iMOv6CIog4
SP - 342
EP - 349
VL - 3676
IS - 1
DP - DeepDyve
ER -