TY - JOUR
AU - Severin, Piet J.
AB - An optical-fibre sensor based on the phase of the signal reflected from a stack of 5i02/Si3N4 layers grown on silica in LPCVD is described in detail. This sensor is an example of a rather straightforward embodiment within the wide range of possible reflection-based optical fibre sensors. The various options allowing more refined solutions matched to the measurement problem are discussed in more general terms. 1.
TI - In-situ film thickness monitoring in CVD and other thin-film deposition processes
JO - Proceedings of SPIE
DO - 10.1117/12.20267
DA - 1990-08-01
UR - https://www.deepdyve.com/lp/spie/in-situ-film-thickness-monitoring-in-cvd-and-other-thin-film-iDC6L1Athg
SP - 130
EP - 136
VL - 1266
IS - 1
DP - DeepDyve
ER -