TY - JOUR
AU - Dou, X.M.
AB - We deposited Co/C multilayer mirrors for a wavelength of 4.77 nm and W/Si multilayer mirrors for a wavelength of 1.77 nm by use of ion-beam sputtering. The small-angle diffraction spectrum was used to analyze the structure of the multilayers. With a combination of the experimental diffraction spectra and Apeles’ theory for calculation of the interfacial roughnesses of the multilayers, the interfacial roughnesses of Co/C and W/Si are 0.80 nm and 0.60 nm, respectively, which are lower than that of the substrate. The reflectivity of the Co/C multilayer is measured to be about 20% and that of the W/Si multilayer about 1% at the grazing incidence angle of about 12°.
TI - Co/C and W/Si multilayers deposited by ion-beam sputtering for the soft X-ray range
JF - Applied Physics A: Materials Science  Processing
DO - 10.1007/s003390000695
DA - 2002-04-01
UR - https://www.deepdyve.com/lp/springer-journals/co-c-and-w-si-multilayers-deposited-by-ion-beam-sputtering-for-the-i90h1Lwhn7
SP - 553
EP - 555
VL - 74
IS - 4
DP - DeepDyve
ER -