TY - JOUR
AU - Degertekin, F.
TI - CMUTs with high-K atomic layer deposition dielectric material insulation layer
JF - IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
DO - 10.1109/tuffc.2014.006481
DA - 2014-12-01
UR - https://www.deepdyve.com/lp/unpaywall/cmuts-with-high-k-atomic-layer-deposition-dielectric-material-ht8sRdVF02
DP - DeepDyve
ER -