TY - JOUR
AU1 - Wu, Peiyun
AB - The manufacture of complex multilayers requires the maker to have a satisfactory monitoring system. The monitoring system can control accuracy not only in optical thicknesses of nonquarterwave layers but can also compensate deposition errors in real-time in order to secure a stable monitoring and eventually to achieve the desired optical performance. In this paper, a computer controlled apparatus for monitoring of wideband optical coatings is described. A method, based on performance measurements during the monitoring of a layer in situ, has been developed to determine the actual refractive index and thickness of the layer in vacuo. The method can be used as a means of detecting deposition errors.
TI - Wideband monitoring of optical coatings with deposition error correction
JF - Proceedings of SPIE
DO - 10.1117/12.163656
DA - 1993-11-25
UR - https://www.deepdyve.com/lp/spie/wideband-monitoring-of-optical-coatings-with-deposition-error-gfstIU7rfm
SP - 121
EP - 132
VL - 2000
IS - 1
DP - DeepDyve
ER -