TY - JOUR
AU - 
AB - EPJ Web of Conferences 238, 03001 (20 20) https://doi.org/10.1051/epjconf/202023803001 EOSAM 2020 Advances in precision freeform manufacturing by plasma jet machining -INVITED 1,2,* 2 2 Thomas Arnold , Georg Boehm , and Faezeh Kazemi Technische Universität Dresden, Institut für Fertigungstechnik, 01062 Dresden, Germany Leibniz Institute of Surface Engineering (IOM), Permoserstr. 15, 04318 Leipzig, Germany Abstract. Atmospheric pressure plasma jet machining technology provides a flexible and efficient way to fabricate precise freeform optics. Due to the pure chemical material removal mechanism based on a dry etching process using fluorine containing gas, the choice of materials that can be treated is limited. Fused silica, Si, SiC or ULE® are easy to machine since the etching products formed are solely volatile. Recently, plasma jet machining has been also adopted to treat optical glasses like N-BK7® which contain amongst others alkali metals that form a solid residual layer during etching. In the paper a new approach to apply deterministic plasma jet etching on optical glass coping with complex etch characteristics caused by the residual layer is introduced. an alternative plasma jet machining was introduced that 1 Introduction provides a flexible and efficient way to fabricate precise Current developments in the field of modern optics 
TI - Advances in precision freeform manufacturing by plasma jet machining -INVITED
JF - EPJ Web of Conferences
DO - 10.1051/epjconf/202023803001
DA - 2020-01-01
UR - https://www.deepdyve.com/lp/unpaywall/advances-in-precision-freeform-manufacturing-by-plasma-jet-machining-g0YfXieEtk
DP - DeepDyve
ER -