TY - JOUR AU1 - Wei, Chia-Ling AU2 - Lin, Chien-Fu AU3 - Tseng, I-Ta AU4 - TI - A Novel MEMS Respiratory Flow Sensor JF - IEEE Sensors Journal DO - 10.1109/jsen.2009.2035192 DA - 2010-01-01 UR - https://www.deepdyve.com/lp/unpaywall/a-novel-mems-respiratory-flow-sensor-frVjSTQvdB DP - DeepDyve ER -