TY - JOUR
AU - Chen, Zhaoquan
AB - In this paper, AZO (ZnO:Al) polycrystalline thin films is produced with strong adhesion to the substrate, which deposit on the glass substrate by PECVD (plasma enhanced chemical vapor deposition) method. The film with the sheet resistance as low as 89ष/(see manuscript), and with transmittance as high as 85% in visible light spans has been obtain. The measurements of the film structure and the experiments to examine the influence of the film electro-optical property have been shown. This AZO film fabricated by PECVD method is a useful attempt, and the results are very important to the choice of actual process of the solar cell.
TI - Research on transparent conductive AZO film fabricated by PECVD method
JF - Proceedings of SPIE
DO - 10.1117/12.839857
DA - 2009-08-24
UR - https://www.deepdyve.com/lp/spie/research-on-transparent-conductive-azo-film-fabricated-by-pecvd-method-epBdr4x0X5
SP - 75180X
EP - 75180X-12
VL - 7518
IS - 1
DP - DeepDyve
ER -