TY - JOUR
AU - Masato Go 
   , Masato Go
AB - Techniques of dosage control for scanning exposure are introduced and the accuracy of exposure dose achieved by these techniques are discussed. Analytical formulation of the dosage accuracy is performed for the first time under consideration of both pulsed energy fluctuation and exposed position jitter. Actual dosage accuracy was measured by adopting the simplest method. Experimental data from the exposure apparatus are shown and the effectiveness of derived formula for dosage error estimation is confirmed. Application for the exposure system is also discussed. 
TI - Dosage Control for Scanning Exposure with Pulsed Energy Fluctuation and Exposed Position Jitter
JF - Japanese Journal of Applied Physics
DO - 10.1143/JJAP.34.6565
DA - 1995-12-01
UR - https://www.deepdyve.com/lp/iop-publishing/dosage-control-for-scanning-exposure-with-pulsed-energy-fluctuation-dIcpP2kECc
SP - 6565
VL - 34
IS - 12S
DP - DeepDyve
ER -