TY - JOUR
AU - Li, Haobo
AB - Laser based 3D measurement sensor are widely used in industrial applications because of its advantage of robust and easy to be employed. However higher measurement accuracy and faster speed are always demanded by more precise and faster fabrication process. This presentation will address this point with optics method. Laser based 3D measurement sensor consists of laser line projector, imaging optics and image process unit with algorithms. This presentation will show an customized imaging optics which based on Scheimpflug principle. It can tilt the focal plane to cover the height measurement range. With this method it can be assured that every image is in focus, and it helps to improve the measurement accuracy. 
TI - Accuracy improvement of optical 3D measurement sensor with optics method
JF - Proceedings of SPIE
DO - 10.1117/12.2689307
DA - 2023-11-06
UR - https://www.deepdyve.com/lp/spie/accuracy-improvement-of-optical-3d-measurement-sensor-with-optics-d6agXqkIB6
SP - 1292127
EP - 1292127-7
VL - 12921
IS - 
DP - DeepDyve
ER -