TY - JOUR
AU - Corso, Thomas N.
AB - The emerging field of microfluidics may provide for the rapid, automated analysis of samples. Here we describe the microfabrication and operation of a nanoelectrospray device formed from the planar surface of a monolithic silicon substrate for electrospray mass spectrometry sample analysis at low nanoliter per minute flow rates. To generate a useful electrospray from a microchip, a high aspect ratio nozzle structure of small dimensions is required. Deep reactive ion etching technologies allow these high aspect ratio structures to be fabricated in parallel and are widely available for the etching of silicon.
TI - Integrated microchip-based nanoelectrospray device for high-throughput mass spectrometry
JF - Proceedings of SPIE
DO - 10.1117/12.427960
DA - 2001-05-21
UR - https://www.deepdyve.com/lp/spie/integrated-microchip-based-nanoelectrospray-device-for-high-throughput-cOw5Xj3pX8
SP - 81
EP - 90
VL - 4265
IS - 1
DP - DeepDyve
ER -