TY - JOUR
AU1 - Thomas, Jr., C. E.
AU2 - Baylor, Larry R.
AU3 - Burns, Steven W.
AU4 - Chidley, Matt
AU5 - Dai, Long
AU6 - Goddard, Jr., James S.
AU7 - Hickson, Joel D.
AU8 - Hylton, Kathy W.
AU9 - John, George C.
AU1 - Patek, Dave R.
AU1 - Price, John H.
AU1 - Rasmussen, David A.
AU1 - Schaefer, Louis J.
AU1 - Tobin, Jr., Kenneth W.
AU1 - Usry, William R.
AB - A method for recording true holograms directly to a digital video medium in a single image has been invented. This technology makes the amplitude and phase for every pixel of the target object wave available. Since phase is proportional wavelength, this makes high-resolution metrology an implicit part of the holographic recording. Measurements of phase can be made to one hundredth or even one thousandth of a wavelength, so the technology is attractive for dining defects on semiconductor wafers, where feature sizes are now smaller than the wavelength of even deep UV light.
TI - Direct to digital holography for semiconductor wafer defect detection and review
JF - Proceedings of SPIE
DO - 10.1117/12.475659
DA - 2002-07-11
UR - https://www.deepdyve.com/lp/spie/direct-to-digital-holography-for-semiconductor-wafer-defect-detection-c6nDXMAdHJ
SP - 180
EP - 194
VL - 4692
IS - 1
DP - DeepDyve
ER -