TY - JOUR
AU - Jun, Jiang
AB - Optical manufacturing is very important to semiconductor, photonics and MEMS, and lithography is a core part of optical manufacturing. The development of lithography technologies, such as coating, exposure, resist and thick resist lithography, are mainly introduced.
TI - Development of lithography technologies
JO - Proceedings of SPIE
DO - 10.1117/12.481731
DA - 2002-09-10
UR - https://www.deepdyve.com/lp/spie/development-of-lithography-technologies-c6cIIyQwYs
SP - 57
EP - 65
VL - 4921
IS - 1
DP - DeepDyve
ER -