TY - JOUR
AU1 - Deng, Chao
AU2 - Liu, Shi-Feng
AU3 - Hao, Xiao-Bo
AU4 - Ji, Jing-Li
AU5 - Liu, Qing
AU6 - Fan, Hai-Yang
AB - For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance. In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1} fiber in the center layer compared with that in the surface layer.
TI - Through-thickness texture gradient of tantalum sputtering target
JF - Rare Metals
DO - 10.1007/s12598-014-0407-z
DA - 2014-11-28
UR - https://www.deepdyve.com/lp/springer-journals/through-thickness-texture-gradient-of-tantalum-sputtering-target-affB3wseF1
SP - 523
EP - 526
VL - 36
IS - 6
DP - DeepDyve
ER -