TY - JOUR
AU - Noell, Wilfried
AB - This paper presents the design, fabrication and operation principle of an optical beam steerer for laser fiber coupling based on a MEMS device. The MEMS chip consists on a bi-dimensional movable platform based on uni-dimensional comb drive actuation. An optical lens is assembled onto the mobile platform to focus and steer the light comping from a laser diode and couple it into an optical fiber. Assembly of a complete system and measurements were performed and compared to simulation results. Both the trajectory of the MEMS and resonance frewquency measurements agree with the simulated ones.
TI - Optical beam steering using a 2D MEMS scanner
JO - Proceedings of SPIE
DO - 10.1117/12.754170
DA - 2007-10-08
UR - https://www.deepdyve.com/lp/spie/optical-beam-steering-using-a-2d-mems-scanner-aCGHZYN3r1
SP - 671502
EP - 671502-9
VL - 6715
IS - 1
DP - DeepDyve
ER -