TY - JOUR
AU - Li, Gongfa
AB - For lithographic tools, the forward model of imaging system is repeated many times in the inverse optimization algorithm of optical proximity correction (OPC). Fast and accurate imaging simulation is highly desirable as one of the most critical components in the forward modeling simulations. We have focused on investigating the physical properties of optical imaging in lithography and introduced the method of separation of variables in Mathematical Physics as the fundamental theory to deal with a wide range of process variables. We proposed a rigorous methodology from first principles to speed up image simulations. The proposed imaging formula can be rearranged by two parts, one with only variables, while the remaining part independent with the variables. Simulations for a variety of different process variables confirmed that the proposed method yields a superior quality of image with an accuracy of 10-3 and superior performance of speed. Therefore, the proposed method provides a novel theory and practical means for OPC and other resolution enhancement technologies (RETs) in optical lithography.
TI - Separation of variables based method for fast calculation of imaging system in lithographic tools
JF - Proceedings of SPIE
DO - 10.1117/12.2506071
DA - 2018-11-15
UR - https://www.deepdyve.com/lp/spie/separation-of-variables-based-method-for-fast-calculation-of-imaging-ZSZvGo0HT7
SP - 1096446
EP - 1096446-6
VL - 10964
IS - 
DP - DeepDyve
ER -