TY - JOUR
AU - DeStefano, Paul R.
AB - Building successive generations of state-of-the-art wide field, sub-micron microlithographic lens systems dictates ever-tightening material tolerances that challenge glass manufacturers. This paper discusses the optical material needs for microlithographic lens systems and Tropel's in-house material qualification program. Material qualification is divided into three successive stages: (1) fluorescence testing to qualitatively analyze color center characteristics of the material; (2) homogeneity testing to determine the relative volumetric variations in index; and (3) absolute index testing at multiple wavelengths to determine the material's dispersion characteristics.
TI - Building world-class microlithographic lens systems: optical material requirements and qualification methods
JF - Proceedings of SPIE
DO - 10.1117/12.165236
DA - 1993-12-06
UR - https://www.deepdyve.com/lp/spie/building-world-class-microlithographic-lens-systems-optical-material-WX0ORjmQo1
SP - 21
EP - 32
VL - 2018
IS - 1
DP - DeepDyve
ER -