TY - JOUR
AU - Gao, Wei
AB - Not available
TI - In-process force monitoring in diamond turning of micropatterns
JF - Proceedings of SPIE
DO - 10.1117/12.403857
DA - 2000-10-10
UR - https://www.deepdyve.com/lp/spie/in-process-force-monitoring-in-diamond-turning-of-micropatterns-TsOU3f0dqC
SP - 412
EP - 416
VL - 4222
IS - 1
DP - DeepDyve
ER -